Experimental process system development unit for producing semiconductor-grade silicon using the silane-to-silicon process. Quarterly progress report, October-December 1979

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This program consists of the engineering design, fabrication, assembly, operation, economic analysis, and process support R and D for an Experimental Process System Development Unit (EPSDU). EPSDU equipment specification, vendor development, and evaluation of quotations represent a significant effort which will permit the start of ordering EPSDU equipment during the next quarter. Initial mini-burner test results are encouraging. It appears that a fairly simple and cost-effective waste treatment system may be possible. Engineering design packages such as the P and I, electrical one-line, and layout are also progressing well. The free-space reactor PDU was assembled and is undergoing checkout. The … continued below

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56 pages

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Creator: Unknown. January 1, 1979.

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This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by the UNT Libraries Government Documents Department to the UNT Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 11 times. More information about this report can be viewed below.

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Description

This program consists of the engineering design, fabrication, assembly, operation, economic analysis, and process support R and D for an Experimental Process System Development Unit (EPSDU). EPSDU equipment specification, vendor development, and evaluation of quotations represent a significant effort which will permit the start of ordering EPSDU equipment during the next quarter. Initial mini-burner test results are encouraging. It appears that a fairly simple and cost-effective waste treatment system may be possible. Engineering design packages such as the P and I, electrical one-line, and layout are also progressing well. The free-space reactor PDU was assembled and is undergoing checkout. The modified seal and shaft of the reactor scraper ran with limited success. A computer modeling of the PDU has been prepared using a two-dimensional axisymmetric model with recirculation. Some test runs have been made. Work on determination of the critical silane decomposition in a fixed bed has been completed. The data generated follow the extension of the Murthy's data. This data, along with the deposition rate data to be acquired, will be used in the fluid-bed reactor design. Present test data show that capacitive heating of the fluid bed and particle separation in a boot are very promising.

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56 pages

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NTIS, PC A04/MF A01.

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • January 1, 1979

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  • Jan. 22, 2018, 7:23 a.m.

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  • March 1, 2021, 6:44 p.m.

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Experimental process system development unit for producing semiconductor-grade silicon using the silane-to-silicon process. Quarterly progress report, October-December 1979, report, January 1, 1979; United States. (https://digital.library.unt.edu/ark:/67531/metadc1056061/: accessed June 1, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.

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