Alloy sputtering at high fluence: Preferential sputtering and competing effects
Description:
This work addresses composition profiles and partial sputter yields of an alloy under ion bombardment. Effects of preferential sputtering, mixing, and gibbsian segregation are modelled. Theoretical basis is an integro-differential equation into which a feasible expression for a segregation current has been included. Dependence on composition of pertinent input parameters like relocation cross sections and atomic volumes is allowed for but not explored explicitly. In the high fluence limit, a st…
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Date:
October 28, 1992
Creator:
Sigmund, P. & Oliva, A.
Item Type:
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