Production coating of vias in alumina substrates with vacuum evaporated chromium and gold

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Design of a production vacuum deposition fixture for coating 3.75 in. by 4.50 in. (95 by 114 mm) alumina substrates with 50 nm of chromium and 6 ..mu..m of gold presented challenges in meeting geometry, mechanical, and cost constraints. The coated substrates had to meet unique requirements for via resistance, thickness uniformity, and backside metallization on hybrid microcircuits. The design required that vacuum evaporated chromium and gold thin films be used with a thru-hole maximum resistance of 25 milliohms on 0.025-in.-dia (0.64 mm) vias in 0.027-in.-thick (0.69 mm) alumina substrates. A resistance of 10 milliohms was a highly desirable design … continued below

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10 pages

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Losure, J. A. January 1, 1976.

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  • Bendix Corporation
    Publisher Info: Bendix Corp., Kansas City, Mo. (USA)
    Place of Publication: Kansas City, Missouri

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Design of a production vacuum deposition fixture for coating 3.75 in. by 4.50 in. (95 by 114 mm) alumina substrates with 50 nm of chromium and 6 ..mu..m of gold presented challenges in meeting geometry, mechanical, and cost constraints. The coated substrates had to meet unique requirements for via resistance, thickness uniformity, and backside metallization on hybrid microcircuits. The design required that vacuum evaporated chromium and gold thin films be used with a thru-hole maximum resistance of 25 milliohms on 0.025-in.-dia (0.64 mm) vias in 0.027-in.-thick (0.69 mm) alumina substrates. A resistance of 10 milliohms was a highly desirable design objective. It was also highly desirable to coat both sides of the substrate and the via walls with chromium before depositing the gold rather than depositing the chromium and the gold on one side of the substrate and then turning the substrate over to deposit the chromium and gold on the other side. Depositing both the chromium and gold on one side of the substrate at a time would result in a layered chromium-gold-chromium-gold structure on the via wall. Commercially available planetary fixtures could not deposit films which met all the design objectives. A study of fixture geometry versus the required film characteristics resulted in the design of a fixture which rotates the substrates 360 degrees about their long axis while simultaneously rotating them about the deposition source in a prolate cycloid motion.

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10 pages

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Dep. NTIS

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  • Electronics components conference, San Francisco, CA, USA, Apr 1976

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  • Report No.: BDX-613-1535
  • Report No.: CONF-760414-3
  • Grant Number: E(29-1)-613
  • Office of Scientific & Technical Information Report Number: 7262154
  • Archival Resource Key: ark:/67531/metadc1445217

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Office of Scientific & Technical Information Technical Reports

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  • January 1, 1976

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  • Feb. 10, 2019, 8:45 p.m.

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  • June 11, 2019, 2:59 p.m.

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Losure, J. A. Production coating of vias in alumina substrates with vacuum evaporated chromium and gold, article, January 1, 1976; Kansas City, Missouri. (https://digital.library.unt.edu/ark:/67531/metadc1445217/: accessed May 27, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.

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