Direct to Digital Holography
Description:
In this CRADA, Oak Ridge National Laboratory (ORNL) assisted nLine Corporation of Austin, TX in the development of prototype semiconductor wafer inspection tools based on the direct-to-digital holographic (DDH) techniques invented at ORNL. Key components of this work included, testing of DDH for detection of defects in High Aspect Ratio (HAR) structures, development of image processing techniques to enhance detection capabilities through the use of both phase and intensity, and development of m…
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Date:
June 15, 2002
Creator:
Bingham, P.R. & Tobin, K.W.
Item Type:
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Report
Partner:
UNT Libraries Government Documents Department