Corrosion-resistant multilayer coatings for the 28-75 nm wavelength region
Description:
Corrosion has prevented use of SiC/Mg multilayers in applications requiring good lifetime stability. We have developed Al-based barrier layers that dramatically reduce corrosion, while preserving high reflectance and low stress. The aforementioned advances may enable the implementation of corrosion-resistant, high-performance SiC/Mg coatings in the 28-75 nm region in applications such as tabletop EUV/soft x-ray laser sources and solar physics telescopes. Further study and optimization of corros…
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Date:
November 8, 2011
Creator:
Soufli, R.; Fernandez-Perea, Monica & Al, E. T.
Partner:
UNT Libraries Government Documents Department