Non-alloyed, refractory metal contact optimization with shallow implantations of Zn and Mg
Description:
Refractory metal contacts to GaAs show great promise for stability during high-temperature processing and for high-reliability. In this paper the authors report a study of sputtered tungsten and tungsten silicide contacts to ion implanted p-GaAs with both Zn and Mg implantations. This study focused on refractory contacts to shallow implanted contact layers that are suitable for devices such as JFETs and HBTs. The very different energy loss mechanisms of Zn and Mg ions result in different levels…
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Date:
March 22, 1994
Creator:
Lovejoy, M. L.; Zolper, J. C.; Sherwin, M. E.; Baca, A. G.; Shul, R. J.; Rieger, D. J. et al.
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UNT Libraries Government Documents Department