Energy Distribution of Sputtered Neutral Atoms from a Multilayer Target
Description:
Energy distribution measurements of sputtered neutral particles contribute to the general knowledge of sputtering, a common technique for surface analysis. In this work emphasis was placed on the measurement of energy distribution of sputtered neutral atoms from different depths. The liquid Ga-In eutectic alloy as a sample target for this study was ideal due to an extreme concentration ratio gradient between the top two monolayers. In pursuing this study, the method of sputter-initiated resonan…
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Date:
August 2000
Creator:
Bigelow, Alan W.
Partner:
UNT Libraries