Side extraction duoPIGatron-type ion source.
Description:
We have designed and constructed a compact duoPIGatron-type ion source, for possible use in ion implanters, in such the ion can be extracted from side aperture in contrast to conventional duoPIGatron sources with axial ion extraction. The size of the side extraction aperture is 1x40 mm. The ion source was developed to study physical and technological aspects relevant to an industrial ion source. The side extraction duoPIGatron has stable arc, uniformly bright illumination, and dense plasma. The…
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Date:
August 26, 2007
Creator:
Gushenets, V. I.; Oks, E. M.; Herschovitch, A. & Johnson, B. M.
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