Step structure of GaInAsSb grown by OMVPE (Organometallic Vapor Phase Epitaxy)
Description:
The microscopic surface morphology of GaInAsSb grown by organometallic vapor phase epitaxy (OMVPE)on GaSb substrates has been studied by atomic force microscopy. The effects of growth temperature, alloy composition, and substrate misorientation on the step structure were investigated. The competition between thermodynamically driven phase separation and kinetically limited surface diffusion is discussed.
Date:
May 23, 1999
Creator:
Charache, G.W. & Wang, C.A.
Item Type:
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