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Electrical properties of a-C:Mo films produced by dual-cathode filtered cathodic arc plasma deposition

Description: Molybdenum-containing amorphous carbon (a-C:Mo) thin films were prepared using a dual-cathode filtered cathodic arc plasma source with a molybdenum and a carbon (graphite) cathode. The Mo content in the films was controlled by varying the deposition pulse ratio of Mo and C. Film sheet resistance was measured in situ at process temperature, which was close to room temperature, as well as ex situ as a function of temperature (300-515 K) in ambient air. Film resistivity and electrical activation e… more
Date: January 20, 2008
Creator: Sansongsiri, Sakon; Anders, Andre & Yodsombat, Banchob
Partner: UNT Libraries Government Documents Department
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