Optimization of Micromachined Photon Devices
Description:
The Oak Ridge National Laboratory has been instrumental in developing ultraprecision technologies for the fabrication of optical devices. We are currently extending our ultraprecision capabilities to the design, fabrication, and testing of micro-optics and MEMS devices. Techniques have been developed in our lab for fabricating micro-devices using single point diamond turning and ion milling. The devices we fabricated can be used in micro-scale interferometry, micro-positioners, micro-mirrors, a…
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Date:
July 18, 1999
Creator:
Datskos, P. G.; Datskou, I.; Evans, B. M., III & Rajic, S.
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Partner:
UNT Libraries Government Documents Department