Process for fabrication of metal oxide films
Description:
This invention is comprised of a method of fabricating metal oxide films from a plurality of reactants by inducing a reaction by plasma deposition among the reactants. The plasma reaction is effective for consolidating the reactants and producing thin films of metal oxides, e.g. electro-optically active transition metal oxides, at a high deposition rate. The presence of hydrogen during the plasma reaction enhances the deposition rate of the metal oxide. Various types of metal oxide films can be…
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Date:
July 17, 1990
Creator:
Tracy, C. E.; Benson, D. & Svensson, S.
Item Type:
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Partner:
UNT Libraries Government Documents Department