Investigation of PACVD protective coating processes using advanced diagnostics techniques
Description:
Coherent anti-Stokes Raman Spectroscopy (CARS) is used to study the plasma-assisted chemical vapor deposition (PACVD) of TiB{sub 2}. CARS is applied to the dominent species in an inductively coupled B{sub 2}H{sub 6}/Ar rf plasma. Axial concentration profiles of diborane and hydrogen are probed in the plasma. A five-step mechanism is developed. Photochemical initiation of the chemical reaction is considered. 16 refs, 5 figs.(DLC)
Date:
July 10, 1992
Creator:
Roman, W.C.
Item Type:
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