Mechanisms for fatigue and wear of polysilicon structural thinfilms
Description:
Fatigue and wear in micron-scale polysilicon structural films can severely impact the reliability of microelectromechanical systems (MEMS). Despite studies on fatigue and wear behavior of these films, there is still an on-going debate regarding the precise physical mechanisms for these two important failure modes. Although macro-scale silicon does not fatigue, this phenomenon is observed in micron-scale silicon. It is shown that for polysilicon devices fabricated in the MUMPs foundry and SUMMiT…
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Date:
December 1, 2006
Creator:
Alsem, Daniel Henricus
Partner:
UNT Libraries Government Documents Department