Coherence techniques at extreme ultraviolet wavelengths
Description:
The renaissance of Extreme Ultraviolet (EUV) and soft x-ray (SXR) optics in recent years is mainly driven by the desire of printing and observing ever smaller features, as in lithography and microscopy. This attribute is complemented by the unique opportunity for element specific identification presented by the large number of atomic resonances, essentially for all materials in this range of photon energies. Together, these have driven the need for new short-wavelength radiation sources (e.g. t…
more
Date:
October 1, 2002
Creator:
Chang, Chang
Partner:
UNT Libraries Government Documents Department