Plasma ion sources and ion beam technology inmicrofabrications
Description:
For over decades, focused ion beam (FIB) has been playing a very important role in microscale technology and research, among which, semiconductor microfabrication is one of its biggest application area. As the dimensions of IC devices are scaled down, it has shown the need for new ion beam tools and new approaches to the fabrication of small-scale devices. In the meanwhile, nanotechnology has also deeply involved in material science research and bioresearch in recent years. The conventional FIB…
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Date:
September 1, 2007
Creator:
Ji, Lili
Partner:
UNT Libraries Government Documents Department